I'm distantly remembering old video about someone shouting at hard disk rack. Those machines are probably acting like a giant microphones when just moving air around is enough to have a too big effect on position measurements.

[Engineer monitors a EUV machine]

[Distant farting sound, machine instantly flashes yellow light for a brief moment]

Carl [shouts back]: Bob, for fsck sake, told you to stop with the beans!

[Machine throws red light and discards current wafer].

Carl [whispers to himself]: Ah crap.